Some further microstructural characteristics of face-centered cubic polycrystalline metal thin films

We have made detailed observations of gold thin films and commercial aluminum-copper alloy films, using transmission electron microscopy. All of the films embody a strong < III > fiber texture. We have measured the misorientation distributions for the grain boundaries in these films, and also...

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Published in:Journal of electronic materials 1997-09, Vol.26 (9), p.987-995
Main Authors: Singh, Varun V., King, Alexander H., Dixit, Girish
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Language:English
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description We have made detailed observations of gold thin films and commercial aluminum-copper alloy films, using transmission electron microscopy. All of the films embody a strong < III > fiber texture. We have measured the misorientation distributions for the grain boundaries in these films, and also determined the 'grain boundary character distribution' in terms of the coincident site lattice model. We show that in spite of their apparent similarity, these films embody significant differences in terms of these measures.
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title Some further microstructural characteristics of face-centered cubic polycrystalline metal thin films
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