Electron beam deposition of gold nanostructures in a reactive environment

Electron beam deposition (EBD) is a maskless technique suitable for the fabrication of nanometer scale structures. Metals can be deposited from an organometallic gas, but simultaneous carbon deposition typically yields grossly impure (∼25% metal) deposits. We have found that the metal content of the...

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Bibliographic Details
Published in:Applied physics letters 1995-04, Vol.66 (16), p.2080-2082
Main Authors: Folch, Albert, Tejada, Javier, Peters, Christopher H., Wrighton, Mark S.
Format: Article
Language:English
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Summary:Electron beam deposition (EBD) is a maskless technique suitable for the fabrication of nanometer scale structures. Metals can be deposited from an organometallic gas, but simultaneous carbon deposition typically yields grossly impure (∼25% metal) deposits. We have found that the metal content of the deposited solid is dramatically improved by performing the whole EBD process in a reactive gaseous environment containing a source of oxygen (O2 or H2O) in addition to the organometallic gas. With simple procedures we prepared Au deposits showing significantly diminished C content (up to 50% metal) as the partial pressure of O2 (or H2O) is increased in the gas.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.113909