X-ray reflectivity study on gold films during sputter deposition

We performed in-situ X-ray reflectivity measurements of gold films during sputter deposition on polished silicon substrates. The measurements were performed at several substrate temperatures and under two argon pressures. The gold surfaces were also examined by scanning tunneling microscopy after de...

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Bibliographic Details
Published in:Surface science 1997-05, Vol.380 (2), p.245-257
Main Authors: Chiarello, R.P., You, H., Kim, H.K., Roberts, T., Kempwirth, R.T., Miller, D., Gray, K.E., Vandervoort, K.G., Trivedi, N., Phillpot, S.R., Zhang, Q.J., Williams, S., Ketterson, J.B.
Format: Article
Language:English
Subjects:
Applied sciences
Atomic force microscopy
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Gold
Growth
Metallic films
Metallic surfaces
Metals. Metallurgy
Models of non-equilibrium phenomena
Non-equilibrium thermodynamics and statistical mechanics
Physics
Polycrystalline surfaces
Polycrystalline thin films
Scanning tunneling microscopy
Silicon
Solid surfaces and solid-solid interfaces
Solid-gas interfaces
Sputtering
Surface roughening
Surface structure and topography
Surface structure, morphology, roughness, and topography
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
X-ray scattering, diffraction, and reflection
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Summary:We performed in-situ X-ray reflectivity measurements of gold films during sputter deposition on polished silicon substrates. The measurements were performed at several substrate temperatures and under two argon pressures. The gold surfaces were also examined by scanning tunneling microscopy after deposition to obtain their real-space topographic images. These images were used to complement the X-ray reflectivity measurements in determining the effect of argon pressure on the gold surface and its height-height difference functions. An approximation for height-height difference functions was employed to analyze the X-ray reflectivity data. The measured interface width during growth followed a simple power law, consistent with recent theoretical results of dynamic scaling behavior. The scaling exponents, however, do not agree well with predictions based on some models in 2 + 1 dimensions.
ISSN:0039-6028
1879-2758
DOI:10.1016/S0039-6028(96)01406-9