Ab initio study of thin metallic and ceramic films

Thin metallic (Al, Mo, Ti) and ceramic (Al 2O 3) layers, prepared by the ion beam assisted deposition, were investigated with the aid of the X-ray reflectivity measurement. A procedure based on the Fourier transformation of the reflectivity curves was applied to resolve the real structure of coating...

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Bibliographic Details
Published in:Thin solid films 1998-07, Vol.324 (1), p.198-208
Main Authors: Rafaja, D., Valvoda, V., Šikola, T., Spousta, J.
Format: Article
Language:English
Subjects:
Applied sciences
Ceramic
Condensed matter: structure, mechanical and thermal properties
Deposition
Exact sciences and technology
Metallic
Metals. Metallurgy
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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Summary:Thin metallic (Al, Mo, Ti) and ceramic (Al 2O 3) layers, prepared by the ion beam assisted deposition, were investigated with the aid of the X-ray reflectivity measurement. A procedure based on the Fourier transformation of the reflectivity curves was applied to resolve the real structure of coatings, namely to submit the number of subsequent layers, their thickness, electron density and roughness. The final refinement of the free parameters of the respective structure model was carried out using the non-linear least-squares algorithm. The applicability of the ab initio method and the stability of the refinement are discussed.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(97)01216-9