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Ion-beam-assisted deposition as a method for production of effective optical coatings

The optical parameters of thin ( d ≈ 100 nm) film coatings of ZnS, LiF and MgF 2 produced by ion-beam-assisted deposition have been investigated using spectrophotometry and ellipsometry techniques. It is observed that coatings produced by ion-beam-assisted deposition are less porous and more stable...

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Bibliographic Details
Published in:Surface & coatings technology 1995-05, Vol.72 (1), p.99-102
Main Authors: Radjabov, T.D., Djamaletdinova, I.E., Sharudo, A.V., Hamidova, H.
Format: Article
Language:English
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Summary:The optical parameters of thin ( d ≈ 100 nm) film coatings of ZnS, LiF and MgF 2 produced by ion-beam-assisted deposition have been investigated using spectrophotometry and ellipsometry techniques. It is observed that coatings produced by ion-beam-assisted deposition are less porous and more stable to moisture influence; meanwhile their adhesion strengths are 15%–20% higher than those for coatings produced without ion bombardment.
ISSN:0257-8972
1879-3347
DOI:10.1016/0257-8972(94)02335-2