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Ion-beam-assisted deposition as a method for production of effective optical coatings
The optical parameters of thin ( d ≈ 100 nm) film coatings of ZnS, LiF and MgF 2 produced by ion-beam-assisted deposition have been investigated using spectrophotometry and ellipsometry techniques. It is observed that coatings produced by ion-beam-assisted deposition are less porous and more stable...
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Published in: | Surface & coatings technology 1995-05, Vol.72 (1), p.99-102 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The optical parameters of thin (
d ≈ 100 nm) film coatings of ZnS, LiF and MgF
2 produced by ion-beam-assisted deposition have been investigated using spectrophotometry and ellipsometry techniques. It is observed that coatings produced by ion-beam-assisted deposition are less porous and more stable to moisture influence; meanwhile their adhesion strengths are 15%–20% higher than those for coatings produced without ion bombardment. |
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ISSN: | 0257-8972 1879-3347 |
DOI: | 10.1016/0257-8972(94)02335-2 |