Combination of specular and off-specular low-angle X-ray diffraction in the study of metallic multilayers

The use of resonant low-angle X-ray diffraction, combining specular and off-specular scans, has been used to characterize accurately and self-consistently the mesoscopic structure and the quality of interfaces for a set of magnetron sputtered Co/Cu multilayers. In addition, the use of a simulation p...

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Bibliographic Details
Published in:Solid state communications 1998-11, Vol.108 (10), p.769-773
Main Authors: de Bernabé, A, Capitán, M.J, Fischer, H.E, Quirós, C, Prieto, C, Colino, J, Mompeán, F, Sanz, J.M
Format: Article
Language:English
Subjects:
A. magnetic films and multilayers
A. surfaces and interfaces
Applied sciences
C. X-ray scattering
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Metals. Metallurgy
Other nonelectronic properties
Physics
Solid surfaces and solid-solid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
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Summary:The use of resonant low-angle X-ray diffraction, combining specular and off-specular scans, has been used to characterize accurately and self-consistently the mesoscopic structure and the quality of interfaces for a set of magnetron sputtered Co/Cu multilayers. In addition, the use of a simulation program to fit experimental patterns, which is based on the Distorted Wave Born Approximation has permitted to confirm its validity in the region of total external reflection in a system having a high degree of complexity.
ISSN:0038-1098
1879-2766
DOI:10.1016/S0038-1098(98)00430-X