Fabrication and electrical properties of sol-gel derived (BaSr)TiO sub(3) thin films with metallic LaNiO sub(3) electrode

Metallic LaNiO sub(3) (LNO) films were prepared on LaAlO sub(3) (LAO) and Si substrates by metal-organic decomposition (MOD) and their application as the bottom electrode for sol-gel derived (BaSr)TiO sub(3) (BST) thin films was studied. X-ray diffraction, atomic force microscope and electrical meas...

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Bibliographic Details
Published in:Thin solid films 1998-12, Vol.336 (1-2), p.172-175
Main Authors: Wu, Di, Li, Aidong, Liu, Zhiguo, Ling, Huiqin, Ge, Chuan Zhen, Liu, Xiaoyong, Wang, Hong, Wang, Min, Lu, Peng, Ming, Naiben
Format: Article
Language:English
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Summary:Metallic LaNiO sub(3) (LNO) films were prepared on LaAlO sub(3) (LAO) and Si substrates by metal-organic decomposition (MOD) and their application as the bottom electrode for sol-gel derived (BaSr)TiO sub(3) (BST) thin films was studied. X-ray diffraction, atomic force microscope and electrical measurements were used to characterize the multilayer films of BST/LNO/substrates. BST film on LNO-coated LAO substrate exhibited preferred (100) orientation. Smooth and dense surface with fine grains (approximately 50 nm) was observed. The electrical measurement results on BST films using LNO and stainless steel as the bottom electrodes, respectively, showed BST/LNO/substrates have higher dielectric constant, lower loss tangent, lower leakage current and higher breakdown voltage.
ISSN:0040-6090