Fuzzy logic in a blackboard system for controlling plasma deposition processes

A blackboard system, ARBS, has been used to control a plasma processing unit, which is used for depositing coatings on the surface of electronic or mechanical components. Previous applications of ARBS have been based on crisp logic, but fuzzy logic was added in this study for plasma deposition contr...

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Bibliographic Details
Published in:Artificial intelligence in engineering 1998-07, Vol.12 (3), p.253-260
Main Authors: Hopgood, A.A., Phillips, H.J., Picton, P.D., Braithwaite, N.St.J.
Format: Article
Language:English
Subjects:
Applied sciences
ARBS
Artificial intelligence
blackboard system
Computer science
control theory
systems
Control theory. Systems
defuzzification
Exact sciences and technology
fuzzy logic
Learning and adaptive systems
multi-variable control
plasma processing
Process control. Computer integrated manufacturing
rules
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Summary:A blackboard system, ARBS, has been used to control a plasma processing unit, which is used for depositing coatings on the surface of electronic or mechanical components. Previous applications of ARBS have been based on crisp logic, but fuzzy logic was added in this study for plasma deposition control. Fuzzy rules have been introduced into ARBS without changing either the rule syntax or the existing inference engines, thereby demonstrating the flexibility of the software. Consequently crisp and fuzzy rules can coexist within a single knowledge source (i.e. module). An efficient technique for defuzzification has been employed in which the membership functions are replaced by Dirac delta functions. The technique is equivalent to standard methods of defuzzification, without loss of precision or accuracy, but with a reduced number of calculations. Multi-variable control of DC-bias (an electrical parameter) by automatic adjustment of pressure and RF (radio frequency) electrical power is demonstrated.
ISSN:0954-1810
DOI:10.1016/S0954-1810(97)00024-1