Microstructure of thermal hillocks on blanket Al thin films

The microstructure of thermal hillocks on blanket Al thin films has been studied for the first time by several techniques, including sectioning and imaging in a focused ion beam system. It is found that the new material in the hillock area lifts the original film up and in some cases penetrates it....

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Bibliographic Details
Published in:Thin solid films 2000-08, Vol.371 (1), p.278-282
Main Authors: Kim, Deok-kee, Heiland, Birgit, Nix, William D, Arzt, Eduard, Deal, Michael D, Plummer, James D
Format: Article
Language:English
Subjects:
Aluminum
Applied sciences
Cold working, work hardening
annealing, post-deformation annealing, quenching, tempering recovery, and crystallization
Cold working, work hardening
annealing, quenching, tempering, recovery, and recrystallization
textures
Condensed matter: structure, mechanical and thermal properties
Creep deformation
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Focused ion beam
Hillock formation
Materials science
Metals. Metallurgy
Microstructure
Physics
Solid surfaces and solid-solid interfaces
Stress relaxation
Surface structure and topography
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Treatment of materials and its effects on microstructure and properties
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Summary:The microstructure of thermal hillocks on blanket Al thin films has been studied for the first time by several techniques, including sectioning and imaging in a focused ion beam system. It is found that the new material in the hillock area lifts the original film up and in some cases penetrates it. The micrographs also reveal the grain structures and give valuable insight into the mechanisms of hillock growth.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(00)00971-8