IMPROVED FABRICATION METHOD FOR Nb/Al/AlOx/Al/Nb SUPERCONDUCTING TUNNEL JUNCTIONS AS X-RAY DETECTORS

Nb-based superconducting tunnel junctions (STJs) with Al trapping layers as X-ray detectors were fabricated. Authors applied a fabrication technique for reducing the leakage current and improving the energy resolution for X-rays at around 6 keV. The edges of two Al layers sandwiching a tunneling bar...

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Bibliographic Details
Published in:Jpn.J.Appl.Phys ,Part 1. Vol. 39, no. 9A, pp. 5090-5094. 2000 Part 1. Vol. 39, no. 9A, pp. 5090-5094. 2000, 2000, Vol.39 (9A), p.5090-5094
Main Authors: Sato, H, Takizawa, Y, Ootani, W, Ikeda, T, Oku, T, Otani, C
Format: Article
Language:English
Online Access:Get full text
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Summary:Nb-based superconducting tunnel junctions (STJs) with Al trapping layers as X-ray detectors were fabricated. Authors applied a fabrication technique for reducing the leakage current and improving the energy resolution for X-rays at around 6 keV. The edges of two Al layers sandwiching a tunneling barrier were oxidized by plasma discharge. The performance of these new STJs was compared with other types of STJs to which thermal oxidization in an O2 atmosphere had been applied. The oxidization process in O2 plasma significantly improved the energy resolution for X-rays, which reached values (FWHM) of 41, 58, 65, and 129 eV for STJs with the size of 20 x 20, 100 x 100, 200 x 200, and 500 x 500 mu m2, resp. 15 refs.
ISSN:0021-4922
DOI:10.1143/JJAP.39.5090