Magnetic thin-film inductors for RF-integrated circuits

Thin-film spiral inductors with micropatterned Fe–Al–O and CoNbZr films for the impedance matching elements in 1 GHz-drive mobile communication handset application have been demonstrated. Narrow slit trains along the easy axis direction control the ferromagnetic resonance frequency through the chang...

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Bibliographic Details
Published in:Journal of magnetism and magnetic materials 2000-06, Vol.215, p.807-810
Main Authors: Yamaguchi, M., Suezawa, K., Takahashi, Y., Arai, K.I., Kikuchi, S., Shimada, Y., Tanabe, S., Ito, K.
Format: Article
Language:English
Subjects:
Complex permeability
Ferromagnetic resonance
Micromagnetic device
Micropatterning
Quality factor
RF-integrated circuits
Spiral coil
Thin-film inductor
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Summary:Thin-film spiral inductors with micropatterned Fe–Al–O and CoNbZr films for the impedance matching elements in 1 GHz-drive mobile communication handset application have been demonstrated. Narrow slit trains along the easy axis direction control the ferromagnetic resonance frequency through the change of shape anisotropy energy and magnetostatic energy. The inductance was advantageous over the air-core spiral while Q was almost the same.
ISSN:0304-8853
DOI:10.1016/S0304-8853(00)00293-6