Scaled‐Up Synthesis of Freestanding Molybdenum Disulfide Membranes for Nanopore Sensing

• Published in: Advanced materials (Weinheim) 2023-03, Vol.35 (12), p.e2207089-n/a
• Main Authors: Alibakhshi, Mohammad Amin, Kang, Xinqi, Clymer, David, Zhang, Zhuoyu, Vargas, Anthony, Meunier, Vincent, Wanunu, Meni
• Format: Article
• Language: English
• Subjects: 2D membranes; Apertures; Chemical synthesis; Chemical vapor deposition; Dielectric breakdown; Fluidics; Graphene; Membranes; Molybdenum; Molybdenum disulfide; Molybdenum oxides; MoS 2; Nanofluids; nanopore sensing; Nucleation; Reagents; scaled‐up synthesis; Substrates; Two dimensional materials; Wetting
• ISSN: 0935-9648; 1521-4095
• DOI: 10.1002/adma.202207089

2D materials are ideal for nanopores with optimal detection sensitivity and resolution. Among these, molybdenum disulfide (MoS2) has gained traction as a less hydrophobic material than graphene. However, experiments using 2D nanopores remain challenging due to the lack of scalable methods for high‐quality freestanding membranes. Herein, a site‐directed, scaled‐up synthesis of MoS2 membranes on predrilled nanoapertures on 4‐inch wafer substrates with 75% yields is reported. Chemical vapor deposition (CVD), which introduces sulfur and molybdenum dioxide vapors across the sub‐100 nm nanoapertures results in exclusive formation of freestanding membranes that seal the apertures. Nucleation and growth near the nanoaperture edges is followed by nanoaperture decoration with MoS2, which proceeds until a critical flake curvature is achieved, after which fully spanning freestanding membranes form. Intentional blocking of reagent flow through the apertures inhibits MoS2 nucleation around the nanoapertures, promoting the formation of large‐crystal monolayer MoS2 membranes. The in situ grown membranes along with facile membrane wetting and nanopore formation using dielectric breakdown enables the recording of dsDNA translocation events at an unprecedentedly high 1 MHz bandwidth. The methods presented here are important steps toward the development of scalable single‐layer membrane manufacture for 2D nanofluidics and nanopore applications. A method to scale up freestanding synthesis of MoS2 sheets on 100 mm‐diameter silicon wafers that have hundreds of nanoapertures is proposed. The MoS2 sheets cover the apertures to form ultrathin membranes that are useful in nanopore sensing.