Properties of laser cut LTCC heaters

This article describes fabrication and properties of buried microheaters made inside low temperature co-fired ceramics (LTCC) structures. Laser cutting is used for meander pattern generation in dried Pt, PtAu or PdAg conductive pads. The electrical characterisation of microheaters is based on measur...

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Bibliographic Details
Published in:Microelectronics and reliability 2000-06, Vol.40 (6), p.1005-1010
Main Authors: Kita, Jaroslaw, Dziedzic, Andrzej, Golonka, Leszek J, Bochenek, Andrzej
Format: Article
Language:English
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Summary:This article describes fabrication and properties of buried microheaters made inside low temperature co-fired ceramics (LTCC) structures. Laser cutting is used for meander pattern generation in dried Pt, PtAu or PdAg conductive pads. The electrical characterisation of microheaters is based on measurement and analysis of R( T) dependence in the range from 20°C to 850°C, measurement and analysis of thermal dynamic properties, long-term high-temperature passive or active ageing and behaviour of the heater in a pulse operation mode. The presented results are very promising for application of LTCC microheaters in various microsystem devices.
ISSN:0026-2714
1872-941X
DOI:10.1016/S0026-2714(00)00008-1