Erratum to : Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings

• Published in: Surface & coatings technology 2000-10, Vol.132 (2-3), p.275-283
• Main Authors: BEWILOGUA, K, COOPER, C. V, SPECHT, C, SCHRÖDER, J, WITTORF, R, GRISCHKE, M
• Format: Article
• Language: English
• Subjects: Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/S0257-8972(00)00746-5

Metal containing diamond-like carbon (Me-DLC) coatings were prepared by magnetron sputter deposition using tungsten, tungsten carbide, niobium and titanium as target materials. An essential parameter for the process characterization is the target voltage. The substrate heating during the film growth depends on the target material. For the W target, the contribution of energetic neutrals to the heat flux is quite high. From the viewpoint of resistance to abrasive wear, the best properties were found for W-DLC. The Nb-DLC coatings have an intermediate wear rate but offer the lowest friction coefficients and a high performance under adhesive weer loading. All Me-DLC coatings investigated in this study exhibit clearly higher wear rates than metal-free DLC films prepared by a radio frequency glow discharge technique. Metallic intermediate layers allow the preparation of coatings with a very good adhesion. Substrates studied include 100Cr6 steel. [This is an erratum to an article orginially published in Surface and Coatings Technology, vol. 127, no. 2-3, pp. 224-232, 22 May 2000, and abstracted in Metals Abstracts under accession number 200009-57-1556.]