Experimental study of endurance characteristics of Al-doped HfO2ferroelectric capacitor

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Bibliographic Details
Published in:Nanotechnology 2023-02, Vol.34 (18)
Main Authors: Choi, Yejoo, Shin, Jaemin, Moon, Seungjun, Min, Jinhong, Han, Changwoo, Shin, Changhwan
Format: Article
Language:English
Online Access:Get full text
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ISSN:1361-6528
DOI:10.1088/1361-6528/acb7fc