Lithographic patterning of benzoylacetone modified SnO2 and SnO2:Sb thin films

The synthesis of directly UV-photopatternable pure and antimony-doped organo-tin materials is presented. UV-photopatternability has been achieved by using the synthesized benzoylacetone modified tin and antimony 2-isopropoxyethoxides. Photopatterned pure and antimony-doped organo-tin films are cryst...

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Published in:Thin solid films 2003-09, Vol.440 (1-2), p.184-189
Main Authors: KOLOLUOMA, Terho, KÄRKKÄINEN, Ari H. O, TOLONEN, Ari, RANTALA, Juha T
Format: Article
Language:English
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Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Liquid phase epitaxy
deposition from liquid phases (melts, solutions, and surface layers on liquids)
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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cited_by cdi_FETCH-LOGICAL-c312t-f3bbe58e1436084dbf60a82023ad12fd77fbd54e7be36ede13a055bf80b80d1a3
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container_issue 1-2
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container_title Thin solid films
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creator KOLOLUOMA, Terho
KÄRKKÄINEN, Ari H. O
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RANTALA, Juha T
description The synthesis of directly UV-photopatternable pure and antimony-doped organo-tin materials is presented. UV-photopatternability has been achieved by using the synthesized benzoylacetone modified tin and antimony 2-isopropoxyethoxides. Photopatterned pure and antimony-doped organo-tin films are crystallized by thermal annealing in order to obtain conductive SnO2 and Sb:SnO2 thin films. The molar ratio between benzoylacetone and metal alkoxides has to be 2 in order to obtain crack-free, good-quality structures. The effects of UV-irradiation, increasing antimony doping level and benzoylacetone concentration on the electrical properties of the single-layered films are analyzed. The highest obtained conductivity was 20 S/cm. Benzoylacetone concentration and UV-irradiation has only a negligible effect on the film electrical conductivities.
doi_str_mv 10.1016/S0040-6090(03)00826-5
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subjects Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Liquid phase epitaxy
deposition from liquid phases (melts, solutions, and surface layers on liquids)
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
title Lithographic patterning of benzoylacetone modified SnO2 and SnO2:Sb thin films
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