Microcavity interferometry for MEMS device characterization

We have developed a high resolution optical technique to measure the electromechanical properties of MEMS microstructures. The technique is applied to microbridges developed for capacitive switching in coplanar radio frequency (RF) waveguides. The thin metal ground plane on the substrate and the bot...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2003-02, Vol.12 (1), p.109-116
Main Authors: Stievater, T.H., Rabinovich, W.S., Newman, H.S., Ebel, J.L., Mahon, R., McGee, D.J., Goetz, P.G.
Format: Article
Language:English
Subjects:
Applied sciences
Beams (radiation)
Bridge circuits
Devices
Direct current
Electronics
Exact sciences and technology
Ground plane
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Interferometers
Micro- and nanoelectromechanical devices (mems/nems)
Microcavities
Microelectromechanical devices
Microelectromechanical systems
Microorganisms
Optical instruments, equipment and techniques
Optical interferometry
Optical noise
Optical sensors
Optical waveguides
Physics
Radio frequencies
Radio frequency
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Ultrafast optics
Wavelength measurement
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Description
Summary:We have developed a high resolution optical technique to measure the electromechanical properties of MEMS microstructures. The technique is applied to microbridges developed for capacitive switching in coplanar radio frequency (RF) waveguides. The thin metal ground plane on the substrate and the bottom of the bridge together form a microcavity for an optical beam. The wavelength of a cavity mode is a sensitive measure of the bridge position relative to the substrate. The technique is applied to the measurement of resonances and damping times of microbridges of varying lengths. It is also used to measure dc changes in bridge height of tenths of nanometers, driven ac displacements of less than a picometer, and bridge displacement noise of hundreds of femtometers per root Hertz. This extreme sensitivity exceeds previously demonstrated optical characterization methods.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2002.807465