Development of a micromachined hazardous gas sensor array

The objective of this work was to develop a micro-hotplate-based gas sensor array for detecting ammonia (NH 3), hydrogen sulfide (H 2S), and methane (CH 4) gases. Sensing film fabrication parameters were studied with micro-hotplates based on resistive temperature detectors and microelectro-mechanica...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2003-08, Vol.93 (1), p.92-99
Main Authors: Mitzner, Kraig D., Sternhagen, Jason, Galipeau, David W.
Format: Article
Language:English
Subjects:
Gas sensor array
Hazardous gas sensor
MEMS gas sensor
Micromachined gas sensor
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Summary:The objective of this work was to develop a micro-hotplate-based gas sensor array for detecting ammonia (NH 3), hydrogen sulfide (H 2S), and methane (CH 4) gases. Sensing film fabrication parameters were studied with micro-hotplates based on resistive temperature detectors and microelectro-mechanical system (MEMS) micro-hotplate arrays. SnO 2/Pt, WO 3/Au, and ZnO sensing films were found sensitive to the target gases NH 3, H 2S, and CH 4, respectively, but had some cross-sensitivity. Other limitations of the sensing films were baseline drift, high resistance, and recovery time. Sensor array responses to the gases were unique, which should allow selectivity to be obtained by pattern recognition.
ISSN:0925-4005
1873-3077
DOI:10.1016/S0925-4005(03)00244-2