Millimeter-Wave Loaded Line Ferroelectric Phase Shifters

Ferroelectric loaded line phase shifters operating at millimeter waves for phased array antenna applications are presented. Phase shifters were manufactured on using Ba 0.3 Sr 0.7 TiO 3 thin films. The magnetron sputtering process was used to fabricate these Ba 0.3 Sr 0.7 TiO 3 ferroelectric films w...

Full description

Saved in:
Bibliographic Details
Published in:Integrated ferroelectrics 2003-01, Vol.55 (1), p.847-852
Main Authors: Kozyrev, A., Ivanov, A., Soldatenkov, O., Tumarkin, A., Ivanova, S., Kaydanova, T., Perkins, J. D., Alleman, J., Ginley, D. S., Sengupta, L., Chiu, L., Zhang, X.
Format: Article
Language:English
Subjects:
ferroelectric thin films
microwave devices
Phase shifters
tunable
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Ferroelectric loaded line phase shifters operating at millimeter waves for phased array antenna applications are presented. Phase shifters were manufactured on using Ba 0.3 Sr 0.7 TiO 3 thin films. The magnetron sputtering process was used to fabricate these Ba 0.3 Sr 0.7 TiO 3 ferroelectric films with a thickness ∼1 μm. The phase shifter operating at V-band (60 GHz) demonstrated continuous phase shift up to 220 deg and figure of merit (FOM) 22 deg/dB. The phase shifter operating at Ka-band (30 GHz) showed phase shift up to 360 deg and FOM 40 deg/dB.
ISSN:1058-4587
1607-8489
DOI:10.1080/10584580390259290