Fabrication and characterization of a molecular adhesive layer for micro- and nanofabricated electrochemical electrodes

In the microelectronics industry, gold electrodes on silicon dioxide are produced using an adhesive layer of chromium or titanium. This method is applicable whenever a dry environment is present. However, when such an electrode is exposed to an electrolyte a galvanic cell is formed and the less nobl...

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Bibliographic Details
Published in:Microelectronic engineering 2003-06, Vol.67, p.887-892
Main Authors: Ling, T.G.I., Beck, M., Bunk, R., Forsén, E., Tegenfeldt, J.O., Zakharov, A.A., Montelius, L.
Format: Article
Language:English
Subjects:
Adhesive monolayer
Chemistry
Electrochemical sensor
Electrochemistry
Electrodes: preparations and properties
Exact sciences and technology
General and physical chemistry
Gold silicon dioxide linkage
Photoelectron spectroscopy
Structured monolayer
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Summary:In the microelectronics industry, gold electrodes on silicon dioxide are produced using an adhesive layer of chromium or titanium. This method is applicable whenever a dry environment is present. However, when such an electrode is exposed to an electrolyte a galvanic cell is formed and the less noble metal will dissolve and eventually destroy the electrode. We describe here how a monolayer of mercaptopropyl-trimethoxysilane (MPTS) can be used as an adhesive. The layer can be structured lithographically making gold electrodes in the micro- and nano-range applicable for use in electrochemistry. The properties of the MPTS layer were investigated with photoelectron microscopy, atomic force microscopy and the electrochemical performance of the gold electrodes was determined by cyclic voltammetry.
ISSN:0167-9317
1873-5568
DOI:10.1016/S0167-9317(03)00151-5