Effect of C/Si Ratio on Spiral Growth on 6H-SiC (0001)

Spiral growth by CVD on 6H-SiC (0001) has been investigated by AFM. The C-to-Si (C/Si) ratio for CVD affects the shape of spiral hillocks. The change in shape originates from the change in the relative rates of spiral growth and step-flow growth: a high C/Si ratio enhances spiral growth, while a low...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2003-07, Vol.42 (Part 2, No. 7B), p.L846-L848
Main Authors: Nakamura, Shun-ichi, Kimoto, Tsunenobu, Matsunami, Hiroyuki
Format: Article
Language:English
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Summary:Spiral growth by CVD on 6H-SiC (0001) has been investigated by AFM. The C-to-Si (C/Si) ratio for CVD affects the shape of spiral hillocks. The change in shape originates from the change in the relative rates of spiral growth and step-flow growth: a high C/Si ratio enhances spiral growth, while a low C/Si ratio enhances step-flow growth. 12 refs.
ISSN:0021-4922
DOI:10.1143/JJAP.42.L846