Fatigue of polycrystalline silicon under long-term cyclic loading

The long-term mechanical behavior of 3.5 μm thick and 50 μm wide polysilicon tensile specimens under tension–tension cyclic loading was investigated. The use of an external actuator allows the variation of the test frequency between 50 and 6000 Hz. It was shown, that the strength of the samples decr...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2003-01, Vol.103 (1), p.9-15
Main Authors: Bagdahn, Jörg, Sharpe, William N.
Format: Article
Language:English
Subjects:
Applied sciences
Condensed matter: structure, mechanical and thermal properties
Electronics
Exact sciences and technology
Fatigue
Fatigue, brittleness, fracture, and cracks
Materials
Mechanical and acoustical properties of condensed matter
Mechanical properties of solids
Physics
Polysilicon
Reliability
Strength
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Summary:The long-term mechanical behavior of 3.5 μm thick and 50 μm wide polysilicon tensile specimens under tension–tension cyclic loading was investigated. The use of an external actuator allows the variation of the test frequency between 50 and 6000 Hz. It was shown, that the strength of the samples decreases with an increasing number of cycles. The tensile strength of σ c=1.1 GPa of virgin samples was reduced by about 35% to a fatigue strength of σ f=0.70 GPa after 10 9 cycles. No influence of frequency of the fatigue behavior in the range of 50–6000 Hz was observed.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(02)00328-X