Growth and nucleation of diamond-like carbon (DLC) film on aluminum

Diamond-like carbon (DLC) films were deposited on aluminum substrate using vacuum arc deposition (VAD) and plasma immersion ion implantation – deposition (PIII-D). Even though Raman and XPS results show that the carbon films deposited by VAD and PIII-D both possess DLC structures, atomic force micro...

Full description

Saved in:
Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2003-05, Vol.206 (Complete), p.691-695
Main Authors: Li, L.H., Tian, X.B., Chu, P.K., Zhang, Y.H., Cui, X.M., Zhang, H.Q.
Format: Article
Language:English
Subjects:
DLC films
Growth
Nucleation
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Diamond-like carbon (DLC) films were deposited on aluminum substrate using vacuum arc deposition (VAD) and plasma immersion ion implantation – deposition (PIII-D). Even though Raman and XPS results show that the carbon films deposited by VAD and PIII-D both possess DLC structures, atomic force microscopy (AFM) reveals that the two sets of films have very different surface morphologies. The growth mechanisms in these two techniques thus differ and the different nucleation and growth mechanisms of the DLC films deposited by VAD and PIII-D can be explained using the statistical formation theory. Growth models for VAD and PIII-D DLC films are proposed.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(03)00827-9