Integrated fabrication of polymeric devices for biological applications

A novel fabrication technique for all-polymeric, microfluidic bio-MEMS devices is presented. This device uses selective electrodeposition of a bio-polymer, chitosan, to successfully create an environment for complex biological experiments within an SU-8 microchannel. The surface energy between SU-8...

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Bibliographic Details
Published in:Sensors and materials 2003, Vol.15 (6), p.295-311
Main Authors: KASTANTIN, Mark J, SHENG LI, GADRE, Anand P, WU, Li-Qun, BENTLEY, William E, PAYNE, Gregory F, RUBLOFF, Gary W, GHODSSI, Reza
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Micro- and nanoelectromechanical devices (mems/nems)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:A novel fabrication technique for all-polymeric, microfluidic bio-MEMS devices is presented. This device uses selective electrodeposition of a bio-polymer, chitosan, to successfully create an environment for complex biological experiments within an SU-8 microchannel. The surface energy between SU-8 and PDMS is measured to be 0.047 - 0.018 J/m2, allowing for reversible encapsulation of the microfluidic channel. The conducting material, polypyrrole, has a conductivity of 47 - 5 S/cm and is explored as a replacement for metal electrodes in future work. It is the successful integration of these four polymers, however, that enables such versatile devices to be fabricated.
ISSN:0914-4935
2435-0869