Iridium Oxide as a Stimulating Neural Electrode Formed by Reactive Magnetron Sputtering

Implantable neural prostheses form hybrid interfaces with biological constructs, and the application of electrical fields can restore functions of patients with neurological damages. The various stoichiometric compositions of iridium oxide were synthesized using reactive magnetron sputtering. The ch...

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Bibliographic Details
Published in:Key engineering materials 2005-01, Vol.288-289, p.307-310
Main Authors: Cui, Fu Zhai, Lee, Y.H., Lee, In Seop, Lee, Geun Hee, Son, Hyun Joo, Park, Jong Chul, Park, J.M.
Format: Article
Language:English
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Summary:Implantable neural prostheses form hybrid interfaces with biological constructs, and the application of electrical fields can restore functions of patients with neurological damages. The various stoichiometric compositions of iridium oxide were synthesized using reactive magnetron sputtering. The charge injection behavior of iridium oxide deposited with an O2/Ar ratio of 0.5 was similar to pure Ir. The charge density of iridium oxide increased with increasing O2/Ar ratio, and increasing thickness of iridium oxide.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.288-289.307