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Structural and dielectric properties of perovskite-type artificial superlattices
BaTiO 3/SrTiO 3, SrZrO 3/SrTiO 3 and BaTiO 3/BaZrO 3 artificial superlattices were fabricated by the molecular beam epitaxy process. X-ray diffraction (XRD) reciprocal space mapping measurement was performed using high-resolution XRD. In all artificial superlattices, the superlattices with the 10-pe...
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Published in: | Thin solid films 2006-06, Vol.509 (1), p.13-17 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | BaTiO
3/SrTiO
3, SrZrO
3/SrTiO
3 and BaTiO
3/BaZrO
3 artificial superlattices were fabricated by the molecular beam epitaxy process. X-ray diffraction (XRD) reciprocal space mapping measurement was performed using high-resolution XRD. In all artificial superlattices, the superlattices with the 10-periodic structure showed the clear satellite peaks in the XRD pattern and were mostly distorted in the direction of film thickness. Superlattices with the 10-periodic structure showed a high dielectric permittivity of
ε
r
=
33,000 or artificially induced ferroelectricity. It was clarified that the anisotropic lattice distortion introduced by the strains due to the lattice mismatch was the origin of the unique dielectric characteristics of artificial superlattices. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/j.tsf.2005.09.008 |