CF/sub 4/ decompositions using streamer- and glow-mode in dielectric barrier discharges

A Dielectric barrier discharge (DBD) is a promising candidate to remove carbon tetrafluoride (CF/sub 4/) because the DBD has been successfully used for generating ozone (O/sub 3/) and decomposing nitrogen oxide (NO). A streamer- and glow-mode operations of DBD were carried out in a coaxial cylinder...

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Bibliographic Details
Published in:IEEE transactions on plasma science 2005-06, Vol.33 (3), p.1041-1046
Main Authors: Kim, Yongho, Kim, Kwan-Tae, Cha, Min Suk, Song, Young-Hoon, Kim, Seock Joon
Format: Article
Language:English
Subjects:
Atmospheric-pressure plasmas
Charge carrier processes
dielectric barrier discharge
Dielectrics
Gases
glow
Laboratories
Machinery
Nitrogen
perforated DBD
Plasma applications
Plasma temperature
Radio frequency
streamer
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Summary:A Dielectric barrier discharge (DBD) is a promising candidate to remove carbon tetrafluoride (CF/sub 4/) because the DBD has been successfully used for generating ozone (O/sub 3/) and decomposing nitrogen oxide (NO). A streamer- and glow-mode operations of DBD were carried out in a coaxial cylinder reactor by coupling 10-kHz alternate current (ac) power. The effect of oxygen on the CF/sub 4/ decompositions was investigated and the optimum oxygen concentrations were found. We compared N/sub 2/-streamer, N/sub 2/-glow, and He-glow modes operated in a DBD to investigate the effect of plasma mode on CF/sub 4/ removal. The results showed that the most efficient CF/sub 4/ removal was obtained in He-glow mode, while N/sub 2/-streamer and N/sub 2/-glow modes demonstrated similar performances. With a practical point of view, we investigated an optimized geometrical configuration of streamer discharge. A micro hole-size perforated DBD showed significant increases in CF/sub 4/ removal efficiency compared to the normal N/sub 2/-streamer mode.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2005.848616