Deformation Behavior of Free-Standing Pd-based Thin Film Metallic Glass for Micro Electro Mechanical Systems Applications

The deformation behavior of thin film metallic glasses (TFMG) both as‐deposited and annealed at the supercooled liquid region (SCLR) near the Tg were investigated by bending TFMG microbeams. It was found that the shear banding behavior, the stress for operating the first shear band and the plastic s...

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Bibliographic Details
Published in:Advanced engineering materials 2005-07, Vol.7 (7), p.606-609
Main Authors: Zhang, G.-P., Liu, Y., Zhang, B.
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Deformation
Exact sciences and technology
Mechanical and acoustical properties
MEMS
Metallic glasses
Physical properties of thin films, nonelectronic
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin films
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Summary:The deformation behavior of thin film metallic glasses (TFMG) both as‐deposited and annealed at the supercooled liquid region (SCLR) near the Tg were investigated by bending TFMG microbeams. It was found that the shear banding behavior, the stress for operating the first shear band and the plastic shear displacement along the shear band plane were dependent on annealing time at the Tg. The deformation mechanism and the controlling of mechanical properties of the TFMG were discussed.
ISSN:1438-1656
1527-2648
DOI:10.1002/adem.200400187