Damping effect on precise track following for nano-motion actuator

We have introduced a nanometer positioning actuator with a high servo bandwidth for a conventional spin-stand. The actuator was required a large working distance over 10 /spl mu/m and a high resonance frequency for a positioning resolution less than 0.5 nm. As the previously designed actuator had a...

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Bibliographic Details
Published in:IEEE transactions on magnetics 2005-02, Vol.41 (2), p.842-848
Main Authors: Mori, S., Tada, H., Naganawa, A., Obinata, G., Ouchi, K.
Format: Article
Language:English
Subjects:
Actuators
Amplitudes
Azimuth
Bandwidth
Cross-disciplinary physics: materials science
rheology
Damper
Dampers
Damping
Exact sciences and technology
Hydraulic actuators
linear tracking
Magnetic heads
Magnetism
Materials science
Nanocomposites
Nanomaterials
Nanostructure
Other topics in materials science
Physics
Piezoelectric actuators
Pneumatic actuators
position control
precise positioning
PZT
Resonance
Resonant frequency
servo writing
Servomechanisms
spin-stand
track following
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Description
Summary:We have introduced a nanometer positioning actuator with a high servo bandwidth for a conventional spin-stand. The actuator was required a large working distance over 10 /spl mu/m and a high resonance frequency for a positioning resolution less than 0.5 nm. As the previously designed actuator had a high peak amplitude, the servo bandwidth was restricted to a low frequency range. A new damping mechanism was introduced to the nanometer positioning actuator. Since the damping mechanism reduces the resonance peak of amplitude down to 2.5% of the original, the servo bandwidth can be expanded to fifteen times as large as that of the damperless system. The actuator with the damping mechanism is effective to improve servo-tracking performance of the spin-stand.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2004.840344