THICKNESS EFFECTS ON PHYSICAL AND FERROELECTRIC PROPERTIES OF Bi3.35La0.85Ti3O12 (BLT) FILMS WITH C-AXIS-PREFERRED AND RANDOM ORIENTATIONS

Thickness effects on dependences of physical and ferroelectric properties were investigated for two kinds of Bi3.35La0.85Ti3O12 (BLT) film with c-axis-preferred and random orientations. BLT films were prepared on Pt/TiOx/SiO2/Si substrates by the metalorganic decomposition method, and their crystall...

Full description

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics, Part 1 Part 1, 2003-02, Vol.42 (2B), p.L182-L185
Main Authors: Yeom, S J, Yang, W S, Kim, N K, Kweon, S Y, Choi, E S, Roh, J S
Format: Article
Language:English
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Thickness effects on dependences of physical and ferroelectric properties were investigated for two kinds of Bi3.35La0.85Ti3O12 (BLT) film with c-axis-preferred and random orientations. BLT films were prepared on Pt/TiOx/SiO2/Si substrates by the metalorganic decomposition method, and their crystalline orientation was controlled by baking and RTA conditions. When scaling down thickness from 210 to 70 nm, the c-axis-oriented film showed a big reduction in switching polarization from 13 to 6 mu C /cm2 due to the predominant negative effect of the increased degree in c-axis-preferred orientation rather than the positive effect of increased grain size. However, the randomly oriented film showed no physical change such that it maintained a large polarization of 15-16 mu C/cm2 in spite of the thickness reduction. Coercive field and fatigue-free property showed no significant thickness dependence for both BLT films. 17 refs.
ISSN:0021-4922
DOI:10.1143/JJAP.42.L182