Magnetic induction micromachine-part II: fabrication and testing

This paper presents the realization of a magnetic induction machine. The development of this machine is part of an ongoing project to create high-power density electric microgenerators for use in portable-power applications. The results reported here focus on testing a first-generation nonlaminated...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2006-04, Vol.15 (2), p.427-439
Main Authors: Cros, F., Koser, H., Allen, M.G., Lang, J.H.
Format: Article
Language:English
Subjects:
Actuators
Density
Devices
Electric power generation
Electromagnetic devices
Electromagnetic induction
Electromagnetism
electroplating
Fabrication
Induction machines
Magnetic devices
Magnetic induction
Magnetic induction micromachine
Metrology
micromolding
micromotor
Nickel
Rotors
Stators
Studies
Testing
tethers
Torque
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Summary:This paper presents the realization of a magnetic induction machine. The development of this machine is part of an ongoing project to create high-power density electric microgenerators for use in portable-power applications. The results reported here focus on testing a first-generation nonlaminated electromagnetic actuator, a metrology device designed for exploring and characterizing the fabrication process and the operating behavior of the magnetic induction micromachine. Achieving high power density requires large electrical currents and magnetic fluxes, which necessitate thick, multilayered microstructures that are difficult to fabricate. The batch-fabrication schemes developed as part of this work are based on low-temperature micromolding that makes extensive use of various ultra-thick photoresists and electroplating of electrical conductors (Cu) and ferromagnetic materials (Ni-Fe 80%-20%), resulting in the successful fabrication of a multilayer two-phase planar stator and a planar rotor. To evaluate the performance of the complete machine (stator plus rotor), a 4-mm-diameter, 500-/spl mu/m-thick electroplated Ni-Fe rotor is tethered to a series of flexible structures that prevent it from making a complete revolution, but allow accurate torque performance extraction. The tethered induction micromotor studied here exhibits torque production as high as 4.8 /spl mu/N/spl middot/m.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2006.872239