Dynamics of CMOS-based thermally actuated cantilever arrays for force microscopy

Arrays of CMOS-based cantilevers with integrated thermal actuators and piezoresistive stress sensors have been fabricated and characterised. A model for the frequency response of the cantilever actuation which corresponds well to the measured behaviour is proposed. The sensor–actuator crosstalk was...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2004-09, Vol.115 (2), p.516-522
Main Authors: Volden, T., Zimmermann, M., Lange, D., Brand, O., Baltes, H.
Format: Article
Language:English
Subjects:
AFM
Cantilever
CMOS
Force microscopy
Thermal actuation
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Summary:Arrays of CMOS-based cantilevers with integrated thermal actuators and piezoresistive stress sensors have been fabricated and characterised. A model for the frequency response of the cantilever actuation which corresponds well to the measured behaviour is proposed. The sensor–actuator crosstalk was studied in order to determine its origin. The performance variations within an array, as well as between arrays on the same wafer, were measured in order to quantify the influence of the process variation. The results have been used to design a compact controller for constant-force imaging. Initial images obtained with this controller are shown.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2004.03.058