Deposition and mechanical evaluation of superhard Ti–Al–Si–N nanocomposite films by a hybrid coating system

New superhard TiAlSiN films, characterized by a nanocomposite comprising nano-sized (Ti,Al,Si)N crystallites embedded in amorphous Si 3N 4 matrix, could be successfully synthesized on WCCo substrates by a hybrid coating system of arc ion plating (AIP) and sputtering method. The hardness and Youn...

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Bibliographic Details
Published in:Thin solid films 2004-01, Vol.447 (Complete), p.443-448
Main Authors: Park, In-Wook, Choi, Sung Ryong, Suh, Ju Hyung, Park, Chan-Gyung, Kim, Kwang Ho
Format: Article
Language:English
Subjects:
Hybrid coating system
Mechanical evaluation
Nanocomposite
Superhard
Ti–Al–Si–N
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Summary:New superhard TiAlSiN films, characterized by a nanocomposite comprising nano-sized (Ti,Al,Si)N crystallites embedded in amorphous Si 3N 4 matrix, could be successfully synthesized on WCCo substrates by a hybrid coating system of arc ion plating (AIP) and sputtering method. The hardness and Young's modulus value of the TiAlSiN film increased with incorporation of Si, and had the maximum value of ∼55 GPa and ∼650 GPa at the Si content of 9 at.%, respectively. The average friction coefficient of the TiAlSiN films largely decreased with an increase of the Si content. This behavior would be attributed to the tribo-chemical reaction between Si and ambient humidity, which enabled to form SiO 2 or Si(OH) 2 tribo-layer playing a role as self-lubricant. The harder TiAlSiN film was found to be more wear-resistant against steel. A systematic work on the microstructure and mechanical properties of TiAlSiN films is reported in this paper.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(03)01122-2