Laser deposited thin organic and inorganic active layers for low temperature ozone sensors

Thin inorganic (In 2O 3, WO 3) and organic-based (indium acetyl-acetonate—InAcAc) active layers of gas sensors were deposited by pulsed laser deposition (PLD). The prepared sensors were tested for atmosphere containing 100 ppb of ozone and 130 ppm of NO x . Low temperature sensitivity, response dyna...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2004-03, Vol.98 (2), p.233-238
Main Authors: Fryček, Rudolf, Vladimı́r, Myslı́k, Martin, Vrňata, Filip, Vysloužil, Jelı́nek, Miroslav, Náhlı́k, Josef
Format: Article
Language:English
Subjects:
In 2O 3
Low temperature sensitivity
Ozone and NO x
Pulsed laser deposition
WO 3 and InAcAc basic materials
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Summary:Thin inorganic (In 2O 3, WO 3) and organic-based (indium acetyl-acetonate—InAcAc) active layers of gas sensors were deposited by pulsed laser deposition (PLD). The prepared sensors were tested for atmosphere containing 100 ppb of ozone and 130 ppm of NO x . Low temperature sensitivity, response dynamics and activation energy ( E a) of surface reaction were studied. The sensitivity ( S) of InAcAc based sensor achieved S=470 at 120 °C to ozone and S=50 at 270 °C to NO x .
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2003.10.024