Enhancement of H2 sensing properties of NiO-based thin films with a Pt surface modification

In this paper, we present the results concerning the Pt surface modification of nickel oxide thin films deposited by dc reactive magnetron sputtering. Pt very thin overlayers with a thickness of about 3 and 5nm have been sputtered on the top of NiO samples. The surface structure and morphology of th...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2004-09, Vol.103 (1-2), p.300-311
Main Authors: Hotovy, I., Huran, J., Siciliano, P., Capone, S., Spiess, L., Rehacek, V.
Format: Article
Language:English
Subjects:
H2 sensor
Nickel oxide
Surface modification
Thin films
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Summary:In this paper, we present the results concerning the Pt surface modification of nickel oxide thin films deposited by dc reactive magnetron sputtering. Pt very thin overlayers with a thickness of about 3 and 5nm have been sputtered on the top of NiO samples. The surface structure and morphology of the samples have been analysed by X-ray diffractometer (XRD) and by scanning electron microscopy (SEM) and atomic force microscopy (AFM), respectively. The electrical responses of the NiO-based sensors towards different H2 concentration (500–5000ppm) have been also considered. The Pt-modified NiO samples showed an enhancement of the response towards H2 as compared to the unmodified NiO sample. The thickness of the Pt thin layers seems also an important parameter in determining the properties of the NiO films as H2 sensors.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2004.04.109