Plasticity size effects in free-standing submicron polycrystalline FCC films subjected to pure tension

• Published in: Journal of the mechanics and physics of solids 2004-03, Vol.52 (3), p.667-689
• Main Authors: Espinosa, H.D., Prorok, B.C., Peng, B.
• Format: Article
• Language: English
• Subjects: Failure; MEMS; Plasticity; Strengthening; Thin films
• ISSN: 0022-5096
• DOI: 10.1016/j.jmps.2003.07.001

The membrane deflection experiment developed by Espinosa and co-workers was used to examine size effects on mechanical properties of free-standing polycrystalline FCC thin films. We present stress–strain curves obtained on films 0.2, 0.3, 0.5 and 1.0 μm thick including specimen widths of 2.5, 5.0, 10.0 and 20.0 μm for each thickness. Elastic modulus was consistently measured in the range of 53– 55 GPa for Au, 125– 129 GPa for Cu and 65– 70 GPa for Al. Several size effects were observed including yield stress variations with membrane width and film thickness in pure tension. The yield stress of the membranes was found to increase as membrane width and thickness decreased. It was also observed that thickness plays a major role in deformation behavior and fracture of polycrystalline FCC metals. A strengthening size scale of one over film thickness was identified. In the case of Au free-standing films, a major transition in the material inelastic response occurs when thickness is changed from 1 to 0.5 μm . In this transition, the yield stress more than doubled when film thickness was decreased, with the 0.5 μm thick specimen exhibiting a more brittle-like failure and the 1 μm thick specimen exhibiting a strain softening behavior. Similar plasticity size effects were observed in Cu and Al. Scanning electron microscopy performed on Au films revealed that the number of grains through the thickness essentially halved, from approximately 5 to 2, as thickness decreased. It is postulated that this feature affects the number of dislocations sources, active slip systems, and dislocation motion paths leading to the observed strengthening. This statistical effect is corroborated by the stress–strain data in the sense that data scatter increases with increase in thickness, i.e., plasticity activity. The size effects here reported are the first of their kind in the sense that the measurements were performed on free-standing polycrystalline FCC thin films subjected to macroscopic homogeneous axial deformation, i.e., in the absence of deformation gradients, in contrast to nanoindentation, beam deflection, and torsion, where deformation gradients occur. To the best of our understanding, continuum plasticity models in their current form cannot capture the observed size scale effects.