Loading…
An XPS study of laser-fabricated polyimide/titanium interfaces
The fabrication of functionally active implantable microsystems, such as neural stimulators and drug delivery systems with micro-porous membranes, often requires joining and hermetic sealing of dissimilar materials. Strong joints between polyimide and titanium plates were fabricated by means of infr...
Saved in:
Published in: | Applied surface science 2004-09, Vol.236 (1-4), p.71-76 |
---|---|
Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | The fabrication of functionally active implantable microsystems, such as neural stimulators and drug delivery systems with micro-porous membranes, often requires joining and hermetic sealing of dissimilar materials. Strong joints between polyimide and titanium plates were fabricated by means of infrared laser irradiation. The polyimide/ titanium interfaces thus obtained were studied by X-ray photoelectron spectroscopy (XPS), and microscopy techniques. The results give evidence for the formation of Ti-C and additional Ti-O chemical bonds in a sharp interfacial region between the two sides. These chemical bonds are believed to be responsible for the observed mechanical strength of the joints. |
---|---|
ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/j.apsusc.2004.03.261 |