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An XPS study of laser-fabricated polyimide/titanium interfaces

The fabrication of functionally active implantable microsystems, such as neural stimulators and drug delivery systems with micro-porous membranes, often requires joining and hermetic sealing of dissimilar materials. Strong joints between polyimide and titanium plates were fabricated by means of infr...

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Bibliographic Details
Published in:Applied surface science 2004-09, Vol.236 (1-4), p.71-76
Main Authors: GEORGIEV, Daniel G, BAIRD, Ronald J, NEWAZ, Golam, AUNER, Gregory, WITTE, Reiner, HERFURTH, Hans
Format: Article
Language:English
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Summary:The fabrication of functionally active implantable microsystems, such as neural stimulators and drug delivery systems with micro-porous membranes, often requires joining and hermetic sealing of dissimilar materials. Strong joints between polyimide and titanium plates were fabricated by means of infrared laser irradiation. The polyimide/ titanium interfaces thus obtained were studied by X-ray photoelectron spectroscopy (XPS), and microscopy techniques. The results give evidence for the formation of Ti-C and additional Ti-O chemical bonds in a sharp interfacial region between the two sides. These chemical bonds are believed to be responsible for the observed mechanical strength of the joints.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2004.03.261