Large tilt angle electrostatic force actuated micro-mirror

A large-angle electrostatic force actuated two-axis rotational micro-mirror has been proposed and demonstrated. A built-in air gap has been introduced in between the mirror and the bottom electrode to provide sufficient space for the rotation of the mirror. As a result, a large tilt angle has been a...

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Bibliographic Details
Published in:IEEE photonics technology letters 2002-11, Vol.14 (11), p.1569-1571
Main Authors: Kim, Tae-Sik, Lee, Sang-Shin, Yee, Youngjoo, Bu, Jong-Uk, Park, Chil-Geun, Ha, Man-Hyo
Format: Article
Language:English
Subjects:
Actuators
Beams (radiation)
Camber
Capacitive sensors
Electric potential
Electrodes
Electrostatic actuators
Electrostatics
Fasteners
Large-scale systems
Mirrors
Optical beams
Optical switches
Substrates
Tilt
Voltage
Wavelength division multiplexing
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Description
Summary:A large-angle electrostatic force actuated two-axis rotational micro-mirror has been proposed and demonstrated. A built-in air gap has been introduced in between the mirror and the bottom electrode to provide sufficient space for the rotation of the mirror. As a result, a large tilt angle has been achieved without using additional actuators. The gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates and then combined. The measured tilt angles were as large as /spl plusmn/7.5/spl deg/ and /spl plusmn/6.4/spl deg/ in the x and y direction, and the pull-in voltages for the two axes were approximately 100 V. The micro-mirror was successfully used to steer an optical beam.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2002.803913