Large-area and double-sided pulsed laser deposition of Y-Ba-Cu-O thin films applied to HTSC microwave devices

Pulsed laser deposition (PLD) of YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) thin films on both sides of 3-inch diameter sapphire wafers and LaAlO/sub 3/ (LAO) cylinder substrates, respectively, is a basic and flexible technique in order to optimize microwave bandpass filters for wireless communication sys...

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Bibliographic Details
Published in:IEEE transactions on applied superconductivity 1997-06, Vol.7 (2), p.1240-1243
Main Authors: Lorenz, M., Hochmuth, H., Natusch, D., Borner, H., Tharigen, T., Patrikarakos, D.G., Frey, J., Kreher, K., Senz, S., Kastner, G., Hesse, D., Steins, M., Schmitz, W.
Format: Article
Language:English
Subjects:
Band pass filters
Current measurement
Density measurement
Microwave theory and techniques
Optical pulses
Pulsed laser deposition
Sputtering
Thickness measurement
Wireless communication
Yttrium barium copper oxide
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Summary:Pulsed laser deposition (PLD) of YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) thin films on both sides of 3-inch diameter sapphire wafers and LaAlO/sub 3/ (LAO) cylinder substrates, respectively, is a basic and flexible technique in order to optimize microwave bandpass filters for wireless communication systems. The large-area and double-side PLD technique allows homogeneous and reproducible YBCO deposition on both substrate sides with inductively measured critical current densities j/sub c/ of 3/spl times/10/sup 6/ to 5/spl times/10/sup 6/ A/cm/sup 2/ at 77 K with a YBCO thickness of 350 nm to 600 nm. Selected results of compositional, structural, electrical, and microwave characterization of the PLD-YBCO films are reported.
ISSN:1051-8223
1558-2515
DOI:10.1109/77.620738