Micromechanical optical switches based on thermocapillary integrated in waveguide substrate

This paper proposes micromechanical optical switches which are suitable for integration in an optical waveguide substrate. The switching mechanism is based on the capillary effect induced by a temperature gradient. The switch has a simple structure which consists of a oil filled slit and a pair of m...

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Bibliographic Details
Published in:Journal of lightwave technology 1999-01, Vol.17 (1), p.14-18
Main Authors: Makihara, M., Sato, N., Shimokawa, F., Nishida, Y.
Format: Article
Language:English
Subjects:
Applied sciences
Capillarity
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Integrated optics
Integrated optics. Optical fibers and wave guides
Laboratories
Micromechanical devices
Oil filled
Optical and optoelectronic circuits
Optical fibers
Optical films
Optical switches
Optical switching
Optical waveguides
Petroleum
Slits
Substrates
Surface tension
Switches
Switching
Temperature gradient
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Summary:This paper proposes micromechanical optical switches which are suitable for integration in an optical waveguide substrate. The switching mechanism is based on the capillary effect induced by a temperature gradient. The switch has a simple structure which consists of a oil filled slit and a pair of microheaters. We designed two types of thermocapillary optical switches. One was a bubble-driven type, the other was an oil-column-driven type. We fabricated both types of 1/spl times/3 micro-switches and demonstrated excellent optical switching and self-latching performance.
ISSN:0733-8724
1558-2213
DOI:10.1109/50.737415