Micromechanical switches fabricated using nickel surface micromachining

Micromechanical switches have been fabricated in electroplated nickel using a four-level surface micromachining process. The simplest devices are configured with three terminals, a source, a drain, and a gate and are 30 /spl mu/m wide, 1 /spl mu/m thick, and 65 /spl mu/m long. A voltage applied betw...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 1997-03, Vol.6 (1), p.3-9
Main Authors: Zavracky, P.M., Majumder, S., McGruer, N.E.
Format: Article
Language:English
Subjects:
Applied sciences
Consumer electronics
Contacts
Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
Electronics
Exact sciences and technology
Micromachining
Micromechanical devices
Microrelays
Microswitches
Nickel
Relays
Switches
Voltage
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Summary:Micromechanical switches have been fabricated in electroplated nickel using a four-level surface micromachining process. The simplest devices are configured with three terminals, a source, a drain, and a gate and are 30 /spl mu/m wide, 1 /spl mu/m thick, and 65 /spl mu/m long. A voltage applied between the gate and source closes the switch, connecting the source to the drain. Devices switch more than 10/sup 9/ cycles before failure and exhibit long-lifetime hot switching currents up to 5 mA. The initial contact resistance is less than 50 m/spl Omega/. The breakdown (stand-off) voltage between the source and the drain is greater than 100 V and the off-current is less than 20 fA at 100 V.
ISSN:1057-7157
1941-0158
DOI:10.1109/84.557524