Error estimation in peak-shape analysis of XPS core-level spectra using UNIFIT 2003: how significant are the results of peak fits?

An error analysis for numerically evaluating random uncertainties in x‐ray photoelectron spectroscopy has been implemented in version 2003 of the spectra treatment and analysis software UNIFIT in order to improve the understanding of the statistical basis and the reliability of the model parameters...

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Bibliographic Details
Published in:Surface and interface analysis 2004-10, Vol.36 (10), p.1373-1383
Main Authors: Hesse, R., Chassé, T., Streubel, P., Szargan, R.
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
data reduction
error analysis
Exact sciences and technology
peak fitting
photoelectron spectroscopy
Physics
spectrum analysis software
UNIFIT
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Summary:An error analysis for numerically evaluating random uncertainties in x‐ray photoelectron spectroscopy has been implemented in version 2003 of the spectra treatment and analysis software UNIFIT in order to improve the understanding of the statistical basis and the reliability of the model parameters for photoelectron spectra. The theoretical basis as well as two approaches to obtain error limits of the fit parameters have been considered. Several test spectra have been analysed and discussed. A representative example has been chosen to demonstrate the relevance of the error estimation for practical surface analysis. Suggestions for the minimization of errors in the peak‐fitting procedures are presented. Copyright © 2004 John Wiley & Sons, Ltd.
ISSN:0142-2421
1096-9918
DOI:10.1002/sia.1925