Improved accuracy of quantitative XPS analysis using predetermined spectrometer transmission functions with UNIFIT 2004

The accuracy of quantitative XPS analysis can be improved using predetermined transmission functions. Two different calibration methods are used for estimating the transmission function T(E) of a photoelectron spectrometer, applying a survey spectra approach (SSA) and a quantified peak‐area approach...

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Bibliographic Details
Published in:Surface and interface analysis 2005-07, Vol.37 (7), p.589-607
Main Authors: Hesse, R., Streubel, P., Szargan, R.
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electron and ion emission by liquids and solids
impact phenomena
Exact sciences and technology
intensity scale calibration
photoelectron spectroscopy
Photoemission and photoelectron spectra
Physics
quantification
spectrum analysis software
transmission function
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Summary:The accuracy of quantitative XPS analysis can be improved using predetermined transmission functions. Two different calibration methods are used for estimating the transmission function T(E) of a photoelectron spectrometer, applying a survey spectra approach (SSA) and a quantified peak‐area approach (QPA) to minimize the quantification error. For the SSA method, Au, Ag and Cu spectra measured with the Metrology Spectrometer II have been used. The new QPA method was built up from Au 4f, Au 4d, Au 4p3/2, Ag 3d, Ag 3p3/2, Cu 3p, Cu 2p3/2, Ge 3p and Ge 2p3/2 standard peak areas, applying adequate ionization cross‐sections and mean free path lengths for different pass energies (10 and 50 eV), lens modes (large area, large area XL, small area 150) and x‐ray sources (Al/Mg Twin and Al Mono). In the energy range 200–1500 eV a transmission function T(E) = a0 + b1E b 2 (where a0, b1 and b2 are variable parameters) was found to give an appropriate approximation for eight tested spectrometer settings, implementing the largest changes in the case of pass energy variations. Determination and application of the transmission functions were integrated in the XPS analysis software (UNIFIT 2004) and tested by means of an Ni90Cr10 alloy. The results demonstrate the practicability of the SSA and QPA methods, giving decreased errors of
ISSN:0142-2421
1096-9918
DOI:10.1002/sia.2056