Thermal characterization of a microheater for micromachined gas sensors

In this paper, a new four-point probe, double spiral heating element configuration for micromachined gas sensors is proposed and a simple analytical model of the steady-state thermal behavior of the microheater is presented. A testing procedure is suggested, based on simple two-wire and four-wire re...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2004-09, Vol.115 (1), p.8-14
Main Authors: Baroncini, M., Placidi, P., Cardinali, G.C., Scorzoni, A.
Format: Article
Language:English
Subjects:
dc Characterization
Gas sensors
Microheater resistor
Microhotplate
Temperature of active area
Thermal model
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Summary:In this paper, a new four-point probe, double spiral heating element configuration for micromachined gas sensors is proposed and a simple analytical model of the steady-state thermal behavior of the microheater is presented. A testing procedure is suggested, based on simple two-wire and four-wire resistance versus power measurements, together with an iterative extraction procedure for the parameters of the thermal model. This allowed us to accurately extract the sensor active area temperature as a function of the total power dissipated on the microheater.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2004.03.012