Thermal response of microfilament heaters in gas sensing

IR thermal imaging in the wavelength range of 3μm < λ < 5μm with a comparable lateral pixel resolution had been used to study the dynamic behaviour of porous silicon micromachined, membrane-type microfilament structures for gas sensing application. Three types of the heater structures, realise...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2004-09, Vol.103 (1-2), p.442-447
Main Authors: Bársony, I., Fürjes, P., Ádám, M., Dücső, Cs, Vı́zváry, Zs, Zettner, J., Stam, F.
Format: Article
Language:English
Subjects:
Calorimetric gas sensors
Frequency response
Microfilaments
Thermal response
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Summary:IR thermal imaging in the wavelength range of 3μm < λ < 5μm with a comparable lateral pixel resolution had been used to study the dynamic behaviour of porous silicon micromachined, membrane-type microfilament structures for gas sensing application. Three types of the heater structures, realised with different thermal isolation, were investigated and modelled by equivalent circuits.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2004.05.003