Temperature-dependent current transport in low-k inorganic dielectrics

Low-k dielectric films based on an inorganic polymer, FOx(R)RG flowable oxide from Dow-Corning Corporation, have been examined. The electric field dependence of the leakage current appears consistent with Poole-Frenkel bulk-limited conductivity. The beta parameter value appropriate to the Poole-Fren...

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2004, Vol.151 (5), p.F128-F131
Main Authors: TRINGE, J. W, SOLOMON, J. S, DEVINE, R. A. B
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Dielectric thin films
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Exact sciences and technology
Physics
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Summary:Low-k dielectric films based on an inorganic polymer, FOx(R)RG flowable oxide from Dow-Corning Corporation, have been examined. The electric field dependence of the leakage current appears consistent with Poole-Frenkel bulk-limited conductivity. The beta parameter value appropriate to the Poole-Frenkel theory is at least 120% larger than the experimentally determined value. Comparison between measurements obtained using Al and Hg electrodes confirms that Poole-Frenkel conduction is in fact dominant. On this basis a typical field-independent trap depth in the range 0.09-0.14 eV is deduced, and the low field conductivity is found to be 1.2 X 10-16-5.7 X 10-74 S cm-1. The role of moisture adsorption is discussed.
ISSN:0013-4651
1945-7111
DOI:10.1149/1.1676746