In situ growth of superconducting YBaCuO using reactive electron-beam coevaporation

Conditions required for in situ growth of YBaCuO thin films by reactive electron-beam evaporation have been explored. Three sources of activated oxygen (atomic oxygen from microwave discharge, plasma generated by electron beams, and an ion beam) were compared. The best results so far were obtained w...

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Bibliographic Details
Published in:IEEE transactions on magnetics 1989-03, Vol.25 (2), p.2418-2421
Main Authors: Missert, N., Hammond, R., Mooij, J.E., Matijasevic, V., Rosenthal, P., Geballe, T.H., Kapitulnik, A., Beasley, M.R., Laderman, S.S., Lu, C., Garwin, E., Barton, R.
Format: Article
Language:English
Subjects:
Atomic beams
Atomic layer deposition
Electron beams
Fault location
Microwave generation
Plasma sources
Superconducting epitaxial layers
Superconducting microwave devices
Superconducting thin films
Yttrium barium copper oxide
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Summary:Conditions required for in situ growth of YBaCuO thin films by reactive electron-beam evaporation have been explored. Three sources of activated oxygen (atomic oxygen from microwave discharge, plasma generated by electron beams, and an ion beam) were compared. The best results so far were obtained with atomic oxygen. Epitaxial films with high critical currents were grown on SrTiO/sub 3/ [100] and [110], Al/sub 2/O/sub 3/ (1102), and MgO [100] at 600 degrees C. Evaporation rates were controlled with a rate monitor using atomic absorption.< >
ISSN:0018-9464
1941-0069
DOI:10.1109/20.92794