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XPS characterisation of neodymium gallate wafers

XPS examinations of NdGaO 3 single crystals were performed. A change of the chemical composition was found in wafers cut from the beginning, middle and end part of a crystal grown along the [0 1 1] direction. The existence of core level satellites at low binding energy related to defects was reveale...

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Bibliographic Details
Published in:Journal of alloys and compounds 2004-09, Vol.377 (1), p.259-267
Main Authors: Talik, E., Kruczek, M., Sakowska, H., Ujma, Z., Gała, M., Neumann, M.
Format: Article
Language:English
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Summary:XPS examinations of NdGaO 3 single crystals were performed. A change of the chemical composition was found in wafers cut from the beginning, middle and end part of a crystal grown along the [0 1 1] direction. The existence of core level satellites at low binding energy related to defects was revealed. Unpolished, polished and substrates etched with H 3PO 4 show a decrease of gallium concentration in relation to a broken surface and to the nominal composition. Annealing of the substrates at different temperatures causes a decomposition due to escape of gallium not only from the surface but from inner parts as well. A comparison of the wafers from the crystals grown along different crystallographic direction reveals changes of the chemical composition and a variable level of defects. This was confirmed by etch pitch density measurements. The above measurements demonstrate the high sensitivity of gallium on processing.
ISSN:0925-8388
1873-4669
DOI:10.1016/j.jallcom.2004.01.037