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XPS characterisation of neodymium gallate wafers
XPS examinations of NdGaO 3 single crystals were performed. A change of the chemical composition was found in wafers cut from the beginning, middle and end part of a crystal grown along the [0 1 1] direction. The existence of core level satellites at low binding energy related to defects was reveale...
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Published in: | Journal of alloys and compounds 2004-09, Vol.377 (1), p.259-267 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | XPS examinations of NdGaO
3 single crystals were performed. A change of the chemical composition was found in wafers cut from the beginning, middle and end part of a crystal grown along the [0
1
1] direction. The existence of core level satellites at low binding energy related to defects was revealed. Unpolished, polished and substrates etched with H
3PO
4 show a decrease of gallium concentration in relation to a broken surface and to the nominal composition. Annealing of the substrates at different temperatures causes a decomposition due to escape of gallium not only from the surface but from inner parts as well. A comparison of the wafers from the crystals grown along different crystallographic direction reveals changes of the chemical composition and a variable level of defects. This was confirmed by etch pitch density measurements. The above measurements demonstrate the high sensitivity of gallium on processing. |
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ISSN: | 0925-8388 1873-4669 |
DOI: | 10.1016/j.jallcom.2004.01.037 |