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Probe station testing of large area silicon drift detectors
Probe stations for STAR Si drift detectors testing were developed and built at BNT and Ohio State University. A throughput of a wafer per day per probe station was reached. The testing procedure and probe station design criteria are discussed.
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Published in: | IEEE transactions on nuclear science 2000-08, Vol.47 (4), p.1375-1380 |
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Main Authors: | , , , , , , , , , , , , , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Probe stations for STAR Si drift detectors testing were developed and built at BNT and Ohio State University. A throughput of a wafer per day per probe station was reached. The testing procedure and probe station design criteria are discussed. |
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ISSN: | 0018-9499 1558-1578 |
DOI: | 10.1109/23.872981 |