Optical deflection measurement for characterization of microelectromechanical systems (MEMS)

Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor. The system is demonstr...

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Bibliographic Details
Published in:IEEE transactions on instrumentation and measurement 2004-08, Vol.53 (4), p.1047-1051
Main Authors: Firebaugh, S.L., Charles, H.K., Edwards, R.L., Keeney, A.C., Wilderson, S.F.
Format: Article
Language:English
Subjects:
Calibration
Displacement measurement
Microelectromechanical systems
Micromechanical devices
Optical fiber sensors
Optical fibers
Optical sensors
Optical switches
Sensor phenomena and characterization
Sensor systems
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Summary:Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor. The system is demonstrated in the characterization of a microwave switch. The deflection system had a demonstrated sensitivity of 290/spl plusmn/32 /spl mu/V/nm over a deflection range of 100 /spl mu/m. The calibration and linearity of the system are described, and the static and dynamic performance is compared to more elaborate systems.
ISSN:0018-9456
1557-9662
DOI:10.1109/TIM.2004.831504